<div class="csl-bib-body">
<div class="csl-entry">Pyka, W. (2000). <i>Feature scale modeling for etching and deposition processes in semiconductor manufacturing</i> [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/180933</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/180933
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dc.description
Zsfassung in dt. Sprache
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dc.language
English
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dc.language.iso
en
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dc.subject
Halbleiterbauelement
de
dc.subject
Fertigung
de
dc.subject
Ätzen
de
dc.subject
Deposition
de
dc.subject
Dreidimensionale Geometrie
de
dc.subject
Simulation
de
dc.title
Feature scale modeling for etching and deposition processes in semiconductor manufacturing
