DC Field
Value
Language
dc.contributor.advisor
Hutter, Herbert
-
dc.contributor.author
Özelt, Gregor
-
dc.date.accessioned
2023-06-18T15:13:20Z
-
dc.date.issued
2002
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Özelt, G. (2002). <i>High performance SIMS analysis of semiconductors</i> [Diploma Thesis, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/181259</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/181259
-
dc.language
English
-
dc.language.iso
en
-
dc.title
High performance SIMS analysis of semiconductors
en
dc.type
Thesis
en
dc.type
Hochschulschrift
de
dc.contributor.affiliation
TU Wien, Österreich
-
tuw.thesisinformation
Technische Universität Wien
-
tuw.publication.orgunit
E164 - Institut für Chemische Technologien und Analytik
-
dc.type.qualificationlevel
Diploma
-
dc.identifier.libraryid
AC03466465
-
dc.description.numberOfPages
97
-
dc.thesistype
Diplomarbeit
de
dc.thesistype
Diploma Thesis
en
tuw.advisor.staffStatus
staff
-
item.languageiso639-1
en
-
item.openairetype
master thesis
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_bdcc
-
crisitem.author.dept
E165 - Institut für Materialchemie
-
crisitem.author.parentorg
E150 - Fakultät für Technische Chemie
-
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