DC Field
Value
Language
dc.contributor.advisor
Bertagnolli, Emmerich
-
dc.contributor.author
Steinlesberger, Gernot
-
dc.date.accessioned
2023-06-18T17:11:25Z
-
dc.date.issued
2003
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Steinlesberger, G. (2003). <i>Scaling limits of copper damascene lines for future interconnection technology</i> [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/181557</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/181557
-
dc.description
Zsfassung in dt. Sprache
-
dc.language
English
-
dc.language.iso
en
-
dc.subject
Halbleiterbauelement
de
dc.subject
Leiterbahn
de
dc.subject
Kupfer
de
dc.subject
Nanostruktur
de
dc.title
Scaling limits of copper damascene lines for future interconnection technology
en
dc.type
Thesis
en
dc.type
Hochschulschrift
de
dc.contributor.affiliation
TU Wien, Österreich
-
tuw.thesisinformation
Technische Universität Wien
-
tuw.publication.orgunit
E362 - Institut für Festkörperelektronik
-
dc.type.qualificationlevel
Doctoral
-
dc.identifier.libraryid
AC03817490
-
dc.description.numberOfPages
184
-
dc.thesistype
Dissertation
de
dc.thesistype
Dissertation
en
tuw.advisor.staffStatus
staff
-
item.languageiso639-1
en
-
item.openairetype
doctoral thesis
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_db06
-
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