Resonant Rotational Reluctance Actuator for Large Range Scanning Mirrors

Abstract

This article presents the design, manufacturing, and evaluation of a scanning mirror system based on a novel resonant rotational reluctance actuator. The system comprises a ferromagnetic mover with a 15-mm aperture, which is actuated by the reluctance force generated by an actuator coil, whose magnetic flux is guided via a ferromagnetic yoke. An integrated angular position sensor system based on optical proximity sensors enables feedback control of the scanning amplitude. The actuator design locates the ferromagnetic yoke on the side of the mover, allowing for a large scanning range of ±13.5 ∘ mechanical with a scanning frequency of 223 Hz. This outperforms the state-of-the-art systems in the performance metric scanning range times aperture size.