DC Field
Value
Language
dc.contributor.author
Hobler, Gerhard
-
dc.contributor.author
Bradley, R. Mark
-
dc.date.accessioned
2023-09-13T11:33:24Z
-
dc.date.available
2023-09-13T11:33:24Z
-
dc.date.issued
2023-03-27
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Hobler, G., &#38; Bradley, R. M. (2023). Sputtering from Sinusoidal Surfaces: Monte Carlo Simulations and Comparison to Analytical Results. In <i>SKM 2023 - scientific programme</i>. Verhandlungen der Deutschen Physikalischen Gesellschaft e.V., Dresden, Germany. Deutsche Physikalische Gesellschaft e.V. http://hdl.handle.net/20.500.12708/188245</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/188245
-
dc.language.iso
en
-
dc.subject
sputter yield
en
dc.subject
surface roughness
en
dc.subject
binary collision approximation
en
dc.subject
simulation
en
dc.title
Sputtering from Sinusoidal Surfaces: Monte Carlo Simulations and Comparison to Analytical Results
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Colorado State University, United States of America (the)
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
SKM 2023 - scientific programme
-
tuw.relation.publisher
Deutsche Physikalische Gesellschaft e.V.
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Surfaces and Interfaces
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.linking
https://www.dpg-verhandlungen.de/year/2023/conference/skm/part/o/session/13/contribution/3?lang=en
-
tuw.linking
https://www.dpg-verhandlungen.de/year/2023/conference/skm/downloads
-
tuw.publication.orgunit
E362-02 - Forschungsbereich Nanoelektronische Bauelemente
-
tuw.publication.orgunit
E362 - Institut für Festkörperelektronik
-
dc.description.numberOfPages
1
-
tuw.author.orcid
0000-0002-2140-6101
-
tuw.author.orcid
0000-0001-6233-9016
-
tuw.event.name
Verhandlungen der Deutschen Physikalischen Gesellschaft e.V.
en
tuw.event.startdate
27-03-2023
-
tuw.event.enddate
31-03-2023
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Dresden
-
tuw.event.country
DE
-
tuw.event.presenter
Hobler, Gerhard
-
wb.sciencebranch
Nanotechnologie
-
wb.sciencebranch
Physik, Astronomie
-
wb.sciencebranch.oefos
2100
-
wb.sciencebranch.oefos
1030
-
wb.sciencebranch.value
50
-
wb.sciencebranch.value
50
-
item.languageiso639-1
en
-
item.openairetype
conference paper
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
crisitem.author.dept
E362-02 - Forschungsbereich Nanoelektronische Bauelemente
-
crisitem.author.dept
Colorado State University
-
crisitem.author.orcid
0000-0002-2140-6101
-
crisitem.author.orcid
0000-0001-6233-9016
-
crisitem.author.parentorg
E362 - Institut für Festkörperelektronik
-
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