<div class="csl-bib-body">
<div class="csl-entry">Poik, M., Hackl, T., Di Martino, S., Schober, M., Dang, J., & Schitter, G. (2023). Analysis of Cross-Talk Induced Measurement Errors in Model-Based RF Voltage Sensing. In <i>2023 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)</i> (pp. 1–6). IEEE. https://doi.org/10.1109/I2MTC53148.2023.10175924</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/189780
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dc.description.abstract
Contactless sensing methods using capacitively cou-pled probes can enable local radio frequency (RF) voltage measurements without the need for large contact pads. This enables a measurement of internal voltage distributions and can significantly facilitate the development of integrated microwave devices. The achievable spatial resolution of these methods is typically limited by parasitic capacitive cross-talk between the probe and adjacent circuit parts. When RF voltage measurements are performed at multiple tip-surface distances, cross-talk can be reduced by employing a suitable model of the distance dependent tip-circuit capacitance. In this paper, the achievable spatial reso-lution and its limitation by cross-talk induced errors is analysed. Electrostatic simulations of the capacitance between a probe tip and different test structures on a passivated circuit are performed and the results are verified by RF voltage measurements on m}-sized test structures at a frequency of 13 GHz. The analysis shows, that the achievable spatial resolution is mainly limited by the passivation layer and that cross-talk induced measurement errors limit the minimum structure size to two times the layer thickness.
en
dc.language.iso
en
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dc.subject
capacitive cross-talk
en
dc.subject
Contactless
en
dc.subject
passive voltage probe
en
dc.subject
radio frequency (RF)
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dc.subject
voltage measurement
en
dc.title
Analysis of Cross-Talk Induced Measurement Errors in Model-Based RF Voltage Sensing
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Infineon Technologies Austria AG, Austria
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dc.contributor.affiliation
Infineon Technologies Austria AG, Austria
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dc.relation.isbn
978-1-6654-5383-7
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dc.relation.issn
2642-2069
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dc.description.startpage
1
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dc.description.endpage
6
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dc.type.category
Full-Paper Contribution
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dc.relation.eissn
2642-2077
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tuw.booktitle
2023 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)