<div class="csl-bib-body">
<div class="csl-entry">Macho, M., Yoo, H. W., Schroedter, R., & Schitter, G. (2023). Iterative Learning Control for Quasi-Static MEMS Mirror with Switching Operation. In <i>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)</i> (pp. 538–541). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052637</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/189782
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dc.description.abstract
This paper reports an iterative learning control (ILC) to compensate for the errors by the switching operation and the modeling inaccuracies for a quasi-static (QS) MEMS mirror. The modeling errors and uncertainties in dynamics with the switching operation between electrodes result in undesirable oscillations in beam positioning. A wideband frequency-domain ILC is proposed for a QS MEMS mirror with a flatness-based feedforward control. The improvement of the residual oscillations is demonstrated by reduced root mean square (RMS) errors for a 2 Hz and a 2-degree-amplitude sawtooth reference with a factor 69.9.
en
dc.description.sponsorship
FFG - Österr. Forschungsförderungs- gesellschaft mbH
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dc.language.iso
en
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dc.relation.ispartofseries
IEEE Explore
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dc.subject
Electrostatic Actuation
en
dc.subject
Iterative Learning Control
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dc.subject
Quasi-Static MEMS Mirror
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dc.subject
Switching Operation
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dc.title
Iterative Learning Control for Quasi-Static MEMS Mirror with Switching Operation
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
TU Dresden, Germany
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dc.relation.isbn
9781665493086
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dc.relation.issn
1084-6999
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dc.description.startpage
538
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dc.description.endpage
541
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dc.relation.grantno
884345
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dcterms.dateSubmitted
2022-09-08
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dc.type.category
Full-Paper Contribution
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dc.relation.eissn
2160-1968
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tuw.booktitle
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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tuw.container.volume
2023-January
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tuw.relation.publisher
IEEE
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tuw.project.title
Vielseitige Technologieplattform von MEMS-Scansystemen für sicherheitssteigernde Automobilanwendungen
