<div class="csl-bib-body">
<div class="csl-entry">Gesing, A. L., Tran, T., Platz, D., & Schmid, U. (2023). Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and Liquids. In <i>2023 IEEE 36th International Conference on Micro Electro Mechanical Systems Conference (MEMS)</i> (pp. 1072–1075). IEEE. https://doi.org/10.1109/MEMS49605.2023.10052411</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/191662
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dc.description.abstract
We present a semi-numerical method for determining the dynamics of non-slender structures in viscous fluids. An investigation of the quality factor (Q-factor) of the vibrational modes of non-slender structures in gases and liquids reveals that, in gases, the conventional Euler-Bernoulli (EB) modes exhibit the lowest Q-factors, while non-EB modes exhibit the highest Q-factors. In liquids, the opposite occurs. EB modes exhibit the highest Q-factors, and non-EB modes the lowest. This opposite Q-factor pattern in gases and liquids is the modal quality factor inversion. We expect the modal quality factor inversion of non-slender resonator geometries to enable novel MEMS fluid sensors.
en
dc.language.iso
en
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dc.subject
Fluid-structure interaction
en
dc.subject
MEMS
en
dc.subject
Micro resonators
en
dc.subject
Plate theory
en
dc.subject
Stokes flow
en
dc.title
Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and Liquids
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.relation.isbn
9781665493086
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dc.description.startpage
1072
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dc.description.endpage
1075
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dc.type.category
Full-Paper Contribution
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tuw.booktitle
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
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tuw.peerreviewed
true
-
tuw.relation.publisher
IEEE
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tuw.researchTopic.id
C6
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tuw.researchTopic.name
Modeling and Simulation
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tuw.researchTopic.value
100
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.1109/MEMS49605.2023.10052411
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dc.description.numberOfPages
4
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tuw.author.orcid
0000-0002-7156-6381
-
tuw.author.orcid
0000-0002-5923-0279
-
tuw.event.name
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
en
tuw.event.startdate
15-01-2023
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tuw.event.enddate
19-01-2023
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tuw.event.online
Hybrid
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tuw.event.type
Event for scientific audience
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tuw.event.place
Munich
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tuw.event.country
DE
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tuw.event.institution
IEEE
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tuw.event.presenter
Gesing, Andre L.
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tuw.event.track
Single Track
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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item.languageiso639-1
en
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item.openairecristype
http://purl.org/coar/resource_type/c_5794
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item.fulltext
no Fulltext
-
item.openairetype
conference paper
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item.grantfulltext
restricted
-
item.cerifentitytype
Publications
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crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.orcid
0000-0002-7156-6381
-
crisitem.author.orcid
0000-0002-5923-0279
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
