<div class="csl-bib-body">
<div class="csl-entry">Platz, D., Loch Gesing, A., Ignat, I., Demattio, D., & Schmid, U. (2023). Non-slender MEMS resonators for advanced AFM applications. In <i>9th Multifrequency AFM Conference - Book of Abstract</i> (pp. 26–26). http://hdl.handle.net/20.500.12708/191663</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/191663
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dc.description.abstract
Atomic force microscopy (AFM) took an astonishing development that started from a simple idea and ended at advanced multifrequency methods today. While AFM equipment has generally involved significantly during this development, MEMS resonators with slender beam geometries remain to be a core component in AFM hardware. The focus on this resonator geometry is easy to understand since it facilitates scanning of sample surfaces. Here, we discuss how slight deviations from the standard beam geometry, namely going to plate resonators with finite width, make additional vibrational modes available for dynamic AFM. Going beyond standard beam geometries requires novel methods for modelling the interaction between resonators and fluid environment [1]. Using these methods, we show that the use of plate resonators has the potential of improving AFM in liquids in terms of the resonator’s quality factor [2]. However, non-conventional resonator geometries lead not only to modified quality factors. The fluid-structure interaction also couples different vibrational modes with important implications to both single- and multifrequency AFM. In the linear regime, these coupling can also be exploited for fluid sensing. In the nonlinear regime, modal couplings allow for implementing sideband cooling or noise squeezing methods [3].
en
dc.language.iso
en
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dc.subject
MEMS
en
dc.subject
Resonator
en
dc.subject
advanced AFM
en
dc.title
Non-slender MEMS resonators for advanced AFM applications
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.description.startpage
26
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dc.description.endpage
26
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dc.type.category
Abstract Book Contribution
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tuw.booktitle
9th Multifrequency AFM Conference - Book of Abstract
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tuw.researchTopic.id
C6
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tuw.researchTopic.name
Modeling and Simulation
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tuw.researchTopic.value
100
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tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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dc.description.numberOfPages
1
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tuw.author.orcid
0000-0002-5923-0279
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tuw.event.name
9th Multifrequency AFM Conference 2023
en
tuw.event.startdate
14-06-2023
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tuw.event.enddate
16-06-2023
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Madrid
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tuw.event.country
ES
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tuw.event.presenter
Platz, Daniel
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tuw.event.track
Multi Track
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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item.fulltext
no Fulltext
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item.grantfulltext
none
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item.languageiso639-1
en
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item.openairetype
conference paper
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item.cerifentitytype
Publications
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item.openairecristype
http://purl.org/coar/resource_type/c_5794
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crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
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crisitem.author.orcid
0000-0002-5923-0279
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik