<div class="csl-bib-body">
<div class="csl-entry">Reiter, T., & Filipovic, L. (2023). Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs. In S. Y. Yurish (Ed.), <i>Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT ’2023))</i> (pp. 67–72). https://doi.org/10.13140/RG.2.2.13265.71524</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/193514
-
dc.description.sponsorship
Christian Doppler Forschungsgesells
-
dc.language.iso
en
-
dc.subject
Process simulation
en
dc.subject
Plasma etching
en
dc.subject
High-aspect-ratio
en
dc.subject
Ray tracing
en
dc.title
Fast 3D Flux Calculation using Monte Carlo Ray Tracing on GPUs
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.description.startpage
67
-
dc.description.endpage
72
-
dc.relation.grantno
00000
-
dc.type.category
Full-Paper Contribution
-
tuw.booktitle
Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT '2023))
-
tuw.peerreviewed
true
-
tuw.project.title
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren
-
tuw.researchTopic.id
Q4
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Nanoelectronics
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E360 - Institut für Mikroelektronik
-
tuw.publisher.doi
10.13140/RG.2.2.13265.71524
-
dc.description.numberOfPages
6
-
tuw.author.orcid
0000-0002-5638-9129
-
tuw.author.orcid
0000-0003-1687-5058
-
tuw.event.name
5th International Conference on Microelectronic Devices and Technologies (MicDAT '2023))
