DC Field
Value
Language
dc.contributor.author
Höflich, K.
-
dc.contributor.author
Hobler, Gerhard
-
dc.contributor.author
Allen, F.
-
dc.contributor.author
Wirtz, T.
-
dc.contributor.author
Rius, G.
-
dc.contributor.author
Hlawacek, Gregor
-
dc.date.accessioned
2024-02-08T11:26:32Z
-
dc.date.available
2024-02-08T11:26:32Z
-
dc.date.issued
2023-11-09
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Höflich, K., Hobler, G., Allen, F., Wirtz, T., Rius, G., &#38; Hlawacek, G. (2023). IB-ThP-2 Roadmap for Focused Ion Beam Technologies. In <i>AVS 69th International Symposium &#38; Exhibition: Abstract Book</i> (pp. 190–190). http://hdl.handle.net/20.500.12708/193678</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/193678
-
dc.language.iso
en
-
dc.subject
focused ion beam
en
dc.subject
ion sources
en
dc.subject
sputtering
en
dc.subject
detectors
en
dc.subject
materials engineering
en
dc.title
IB-ThP-2 Roadmap for Focused Ion Beam Technologies
-
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Ferdinand-Braun-Institut, Germany
-
dc.contributor.affiliation
University of California, Berkeley, United States of America (the)
-
dc.contributor.affiliation
Luxembourg Institute of Science and Technology, Luxembourg
-
dc.contributor.affiliation
Institut de Microelectrònica de Barcelona, Spain
-
dc.contributor.affiliation
Helmholtz-Zentrum Dresden-Rossendorf, Germany
-
dc.description.startpage
190
-
dc.description.endpage
190
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
AVS 69th International Symposium & Exhibition: Abstract Book
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
Q4
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Nanoelectronics
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
30
-
tuw.researchTopic.value
30
-
tuw.researchTopic.value
40
-
tuw.publication.orgunit
E362-02 - Forschungsbereich Nanoelektronische Bauelemente
-
dc.description.numberOfPages
1
-
tuw.author.orcid
0000-0002-2140-6101
-
tuw.event.name
AVS 69th International Symposium & Exhibition
en
tuw.event.startdate
05-11-2023
-
tuw.event.enddate
10-11-2023
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Portland
-
tuw.event.country
US
-
tuw.event.presenter
Hlawacek, Gregor
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.grantfulltext
none
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
item.openairetype
conference paper
-
item.cerifentitytype
Publications
-
item.fulltext
no Fulltext
-
item.languageiso639-1
en
-
crisitem.author.dept
Ferdinand-Braun-Institut, Germany
-
crisitem.author.dept
E362-02 - Forschungsbereich Nanoelektronische Bauelemente
-
crisitem.author.dept
University of California, Berkeley
-
crisitem.author.dept
Luxembourg Institute of Science and Technology
-
crisitem.author.dept
Institut de Microelectrònica de Barcelona, Spain
-
crisitem.author.dept
Helmholtz-Zentrum Dresden-Rossendorf
-
crisitem.author.orcid
0000-0002-2140-6101
-
crisitem.author.parentorg
E362 - Institut für Festkörperelektronik
-
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