DC Field
Value
Language
dc.contributor.author
Blödorn, Felix
-
dc.contributor.author
Simperl, Florian
-
dc.contributor.author
Werner, Wolfgang
-
dc.date.accessioned
2024-09-19T07:16:27Z
-
dc.date.available
2024-09-19T07:16:27Z
-
dc.date.issued
2024-09-09
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Blödorn, F., Simperl, F., &#38; Werner, W. (2024, September 9). <i>Energy dissipation of low-energy electrons in PMMA investigated with electron coincidence spectroscopy (SE2ELCS)</i> [Poster Presentation]. Low Energy Electron Applications in Patterning (LE2AP) + Low Energy Electron Lithography, Imaging, Soft Matter and Application in Patterning (LEELIS), 2024, Leuven, Belgium. http://hdl.handle.net/20.500.12708/200689</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/200689
-
dc.language.iso
en
-
dc.subject
coincidence spectroscopy
en
dc.subject
electron spectroscopy
en
dc.subject
electron beam manufacturing
en
dc.subject
electron lithography
en
dc.subject
soft matter
en
dc.title
Energy dissipation of low-energy electrons in PMMA investigated with electron coincidence spectroscopy (SE2ELCS)
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Poster Presentation
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.name
Surfaces and Interfaces
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E134-03 - Forschungsbereich Atomic and Plasma Physics
-
tuw.author.orcid
0009-0003-0924-9726
-
tuw.event.name
Low Energy Electron Applications in Patterning (LE2AP) + Low Energy Electron Lithography, Imaging, Soft Matter and Application in Patterning (LEELIS), 2024
en
tuw.event.startdate
09-09-2024
-
tuw.event.enddate
11-09-2024
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Leuven
-
tuw.event.country
BE
-
tuw.event.presenter
Blödorn, Felix
-
wb.sciencebranch
Physik, Astronomie
-
wb.sciencebranch.oefos
1030
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference poster not in proceedings
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_18co
-
crisitem.author.dept
E134-03 - Forschungsbereich Atomic and Plasma Physics
-
crisitem.author.dept
E134-03 - Forschungsbereich Atomic and Plasma Physics
-
crisitem.author.orcid
0009-0003-0924-9726
-
crisitem.author.parentorg
E134 - Institut für Angewandte Physik
-
crisitem.author.parentorg
E134 - Institut für Angewandte Physik
-
Appears in Collections:
Presentation
Show simple item record

Page view(s)

59
checked on Sep 19, 2024

Download(s)

1
checked on Sep 19, 2024

Google ScholarTM

Check