DC Element
Wert
Sprache
dc.contributor.author
Höflich, Katja
-
dc.contributor.author
Hobler, Gerhard
-
dc.contributor.author
Allen, Frances
-
dc.contributor.author
Wirtz, Tom
-
dc.contributor.author
Rius, Gemma
-
dc.contributor.author
Hlawacek, Gregor
-
dc.date.accessioned
2024-10-30T11:51:40Z
-
dc.date.available
2024-10-30T11:51:40Z
-
dc.date.issued
2024-10-31
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Höflich, K., Hobler, G., Allen, F., Wirtz, T., Rius, G., &#38; Hlawacek, G. (2024). Roadmap for Focused Ion Beam Technologies. In <i>EIPBN 2024 Abstracts</i>. 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2024), La Jolla, United States of America (the). http://hdl.handle.net/20.500.12708/203821</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/203821
-
dc.language.iso
en
-
dc.subject
focused ion beam
en
dc.subject
ion sources
en
dc.subject
beam transport
en
dc.subject
detectors
en
dc.subject
correlative approach
en
dc.subject
binary collision approximation
en
dc.subject
molecular dynamics
en
dc.subject
kinetic Monte Carlo
en
dc.subject
continuum modeling
en
dc.subject
sputtering
en
dc.subject
secondary ion mass spectrometry
en
dc.subject
FIB induced deposition
en
dc.subject
plasmonics
en
dc.title
Roadmap for Focused Ion Beam Technologies
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Ferdinand-Braun-Institut, Germany
-
dc.contributor.affiliation
Luxembourg Institute of Science and Technology, Luxembourg
-
dc.contributor.affiliation
Institut de Microelectrònica de Barcelona, Spain
-
dc.contributor.affiliation
Helmholtz-Zentrum Dresden-Rossendorf, Germany
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
EIPBN 2024 Abstracts
-
tuw.peerreviewed
true
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
Q4
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Nanoelectronics
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
35
-
tuw.researchTopic.value
30
-
tuw.researchTopic.value
35
-
tuw.publication.orgunit
E362-02 - Forschungsbereich Nanoelektronische Bauelemente
-
dc.description.numberOfPages
2
-
tuw.author.orcid
0000-0003-4088-2928
-
tuw.author.orcid
0000-0002-2140-6101
-
tuw.author.orcid
0000-0002-0311-8624
-
tuw.author.orcid
0000-0002-7912-5193
-
tuw.author.orcid
0000-0003-0552-1043
-
tuw.author.orcid
0000-0001-7192-716X
-
tuw.event.name
67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2024)
en
tuw.event.startdate
28-05-2024
-
tuw.event.enddate
31-05-2024
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
La Jolla
-
tuw.event.country
US
-
tuw.event.presenter
Hlawacek, Gregor
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.fulltext
no Fulltext
-
item.openairetype
conference paper
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
item.grantfulltext
none
-
crisitem.author.dept
Ferdinand-Braun-Institut
-
crisitem.author.dept
E362-02 - Forschungsbereich Nanoelektronische Bauelemente
-
crisitem.author.dept
University of California, Los Angeles
-
crisitem.author.dept
Luxembourg Institute of Science and Technology
-
crisitem.author.dept
Institut de Microelectrònica de Barcelona
-
crisitem.author.dept
Helmholtz-Zentrum Dresden-Rossendorf
-
crisitem.author.orcid
0000-0003-4088-2928
-
crisitem.author.orcid
0000-0002-2140-6101
-
crisitem.author.orcid
0000-0002-0311-8624
-
crisitem.author.orcid
0000-0002-7912-5193
-
crisitem.author.orcid
0000-0003-0552-1043
-
crisitem.author.orcid
0000-0001-7192-716X
-
crisitem.author.parentorg
E362 - Institut für Festkörperelektronik
-
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