<div class="csl-bib-body">
<div class="csl-entry">Höflich, K., Hobler, G., Allen, F., Wirtz, T., Ruis Gemma, & Hlawacek, G. (2024). Roadmap for Focused Ion Beam Technologies. In <i>IBMM2024 International Conference on Ion Beam Modification of Materials (IBMM): Abstract Book</i>. 23rd International Conference on Ion Beam Modification of Materials (IBMM2024), London, United Kingdom of Great Britain and Northern Ireland (the). http://hdl.handle.net/20.500.12708/204129</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/204129
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dc.description
focused ion beam; Ion sources; beam transport; detectors; correlative approach; binary collision approximation; molecular dynamics; kinetic Monte Carlo; continuum modeling; sputtering; materials engineering; defects; imaging; tomography; secondary ion mass spectrometry; FIB induced deposition; Plasmonics; Superconductivity; Photomasks; Scanning electron microscopy; Interatomic potentials; Nanocrystals; Nanomaterials; Adsorp
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dc.language.iso
en
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dc.subject
focused ion beam
en
dc.subject
Ion sources
en
dc.subject
beam transport
en
dc.subject
detectors
en
dc.subject
correlative approach
en
dc.subject
FIB induced deposition
en
dc.subject
kinetic Monte Carlo
en
dc.subject
sputtering
en
dc.title
Roadmap for Focused Ion Beam Technologies
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Ferdinand-Braun-Institut, Germany
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dc.contributor.affiliation
University of California, Berkeley, United States of America (the)
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dc.contributor.affiliation
Luxembourg Institute of Science and Technology, Luxembourg
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dc.contributor.affiliation
Institut de Microelectrònica de Barcelona, Spain
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dc.contributor.affiliation
Helmholtz-Zentrum Dresden-Rossendorf, Germany
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dc.type.category
Poster Contribution
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tuw.booktitle
IBMM2024 International Conference on Ion Beam Modification of Materials (IBMM): Abstract Book
