<div class="csl-bib-body">
<div class="csl-entry">Salvadores Farran, N., Wojcik, T., Jerg, C., Gies, A., Ramm, J., Kolozsvári, S., Polcik, P., Huber, T., Fleig, J., & Riedl, H. (2024, June 11). <i>Electrical and morphological properties at high temperature of reactive PVD-deposited AlN coatings</i> [Presentation]. ÖGV Seminar, Villach, Austria. http://hdl.handle.net/20.500.12708/207524</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/207524
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dc.description.abstract
Aluminium nitride (AlN) is renowned for its insulating properties and thermodynamic stability. Therefore, it is suitable for various applications in a wide temperature range. Consequently, it is relevant to investigate cost-effective and sustainable deposition techniques for growing thin films of AlN.
Within this study, the deposition of AlN thin films via reactively physical vapor deposition (PVD) was been studied. Films were grown using 3’’ Al targets and N2 as a reactive gas in an in-house developed magnetron sputter system.
To address the challenges of growing reactive insulating films, various techniques, including direct magnetron sputtering (DCMS), high-power pulsed magnetron sputtering (HPPMS), and pulsed magnetron sputtering (PMS), were employed.
Phase formation was examined using X-ray diffractometry, while the deposition rate and film morphology were investigated through scanning and transmission electron microscopy. The insulating behaviour of the coatings was analysed using in-situ impedance spectroscopy across a temperature range from 400 to 900°C.
A threshold reactive gas amount is required to shift the electric behaviour from a metallic to a dielectric mode, resulting in higher electrical resistivity the films deposited via HIPIMS.
en
dc.description.sponsorship
Christian Doppler Forschungsgesells
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dc.language.iso
en
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dc.subject
Insulating coatings
en
dc.subject
PVD
en
dc.subject
HIPIMS
en
dc.title
Electrical and morphological properties at high temperature of reactive PVD-deposited AlN coatings
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.contributor.affiliation
TU Wien, Austria
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dc.contributor.affiliation
Oerlikon (Liechtenstein), Liechtenstein
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dc.contributor.affiliation
Oerlikon (Liechtenstein), Liechtenstein
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dc.contributor.affiliation
Plansee (Germany), Germany
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dc.relation.grantno
CDL-SEC
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dc.type.category
Presentation
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tuw.project.title
Oberflächentechnik von hochbeanspruchten Präzisionskomponenten
