Integrated Optics Waveguides and Mesoporous Oxides for the Monitoring of Volatile Organic Compound Traces in the Mid-Infrared

Abstract

Volatile organic compounds (VOCs) are an ever-growing hazard for health and environment due to their increased emissions and accumulation in the air. Quantum cascade laser-based infrared (QCL-IR) sensors hold significant promise for gas monitoring, thanks to their compact, rugged design, high laser intensity, and high molecule-specific detection capabilities within the mid-infrared spectrum's fingerprint region. In this work, tunable external cavity QCLs were complemented by an innovative germanium-on-silicon integrated optics waveguide sensing platform with integrated microlenses for efficient backside optical interfacing for the tunable laser spectrometer. The waveguide chip was coated with a mesoporous silica coating, thereby increasing the signal by adsorptive enhancement of VOCs while at the same time limiting water vapor interferences. Different least square fitting methods were explored to deconvolute the resulting spectra, showing subparts-per-million by volume (sub-ppmv) limits of detection and enrichment factors of up to 22 000 while keeping the footprint of the setup small (29 × 23 × 11 cm³). Finally, a use-case simulation for the continuous detection of VOCs in a process analytical technology environment confirmed the high potential of the technique for the monitoring of contaminants. By successfully demonstrating the use of photonic waveguides for the monitoring of VOCs, this work offers a promising avenue for the further development of fully integrated sensors on a chip.