<div class="csl-bib-body">
<div class="csl-entry">Demesh, M., Tolstik, N., Sorokin, E., Kalashnikov, V., Rudenkov, A., Einmo, E., Di Sabatino, M., & Sorokina, I. T. (2024). Control of nonlinearity enables 3D silicon processing. In <i>High-Brightness Sources and Light-Driven Interactions Congress</i>. Optica High-Brightness Sources and Congress Light-Driven Interactions Congress, Wien, Austria. https://doi.org/10.1364/MICS.2024.MTh2C.4</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/208622
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dc.description.abstract
We demonstrate effective control of the shape and depth of sub-wavelength-sized structures in silicon through repeatable single pulse modifications at the optimum wavelength of 2.1 μm, which provides a balance of Kerr-effect and multi-photon absorption.
en
dc.language.iso
en
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dc.relation.ispartofseries
Technical Digest Series
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dc.subject
Kerr effect
en
dc.subject
Silicon
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dc.subject
ultrafast lasers
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dc.title
Control of nonlinearity enables 3D silicon processing
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Norwegian University of Science and Technology, Norway
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dc.contributor.affiliation
Norwegian University of Science and Technology, Norway
