DC Field
Value
Language
dc.contributor.author
Muringakodan, Shareena
-
dc.contributor.author
Schmid, Ulrich
-
dc.contributor.author
Schneider, Michael
-
dc.date.accessioned
2025-01-15T11:47:50Z
-
dc.date.available
2025-01-15T11:47:50Z
-
dc.date.issued
2024-09
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Muringakodan, S., Schmid, U., &#38; Schneider, M. (2024, September). <i>STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANES</i> [Conference Presentation]. MNE 2024 - 50th International conference on Micro and Nano Engineering, Montpellier, France. http://hdl.handle.net/20.500.12708/208774</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/208774
-
dc.language.iso
en
-
dc.subject
STRESS OPTIMIZATION
en
dc.subject
Magnetron sputtered
en
dc.subject
AlN
en
dc.subject
thin films
en
dc.title
STRESS OPTIMIZATION IN MAGNETRON SPUTTERED ALN THIN FILMS FOR FABRICATING BISTABLE PIEZOMEMS MEMBRANES
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Conference Presentation
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.author.orcid
0000-0001-9846-7132
-
tuw.event.name
MNE 2024 - 50th International conference on Micro and Nano Engineering
en
tuw.event.startdate
16-09-2024
-
tuw.event.enddate
19-09-2024
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Montpellier
-
tuw.event.country
FR
-
tuw.event.presenter
Muringakodan, Shareena
-
tuw.event.track
Single Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference paper not in proceedings
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cp
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.orcid
0000-0001-9846-7132
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
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