<div class="csl-bib-body">
<div class="csl-entry">Ermilova, E., Klapetek, P., Pfusterschmied, G., Nanjappan, C., Schmid, U., & Hertwig, A. (2024, May 29). <i>On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics</i> [Conference Presentation]. EMRS Spring Meeting 2024 - ALTECH 2024, Strasbourg, France. http://hdl.handle.net/20.500.12708/208807</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/208807
-
dc.language.iso
en
-
dc.subject
Spectroscopic Imaging Ellipsometry
en
dc.subject
Quantification
en
dc.subject
Characterisation
en
dc.subject
Thin films
en
dc.subject
Power Electronics
en
dc.title
On the Use of Spectroscopic Imaging Ellipsometry for Quantification and Characterisation of Defects in Thin Films for Power Electronics
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.contributor.affiliation
Brno University of Technology, Czechia
-
dc.type.category
Conference Presentation
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.author.orcid
0000-0003-2735-9008
-
tuw.author.orcid
0000-0001-5241-9178
-
tuw.event.name
EMRS Spring Meeting 2024 - ALTECH 2024
en
tuw.event.startdate
27-05-2024
-
tuw.event.enddate
31-05-2024
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Strasbourg
-
tuw.event.country
FR
-
tuw.event.presenter
Hertwig, Andreas
-
tuw.event.track
Multi Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference paper not in proceedings
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_18cp
-
crisitem.author.dept
Brno University of Technology
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.orcid
0000-0003-2735-9008
-
crisitem.author.orcid
0000-0001-5241-9178
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
