DC Field
Value
Language
dc.contributor.author
Wahid, Shan
-
dc.contributor.author
Leitgeb, Markus
-
dc.contributor.author
Pfusterschmied, Georg
-
dc.contributor.author
Schmid, Ulrich
-
dc.date.accessioned
2025-01-17T09:43:35Z
-
dc.date.available
2025-01-17T09:43:35Z
-
dc.date.issued
2024-06
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Wahid, S., Leitgeb, M., Pfusterschmied, G., &#38; Schmid, U. (2024, June). <i>A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling</i> [Poster Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208947</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/208947
-
dc.language.iso
en
-
dc.subject
4H-SiC
en
dc.subject
Foils
en
dc.subject
Substrates
en
dc.subject
Method of Creating
en
dc.title
A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.contributor.affiliation
E366-02
-
dc.type.category
Poster Presentation
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
tuw.author.orcid
0000-0003-1609-4497
-
tuw.event.name
MESS24 - Microelectronic Systems Symposium
en
tuw.event.startdate
06-06-2024
-
tuw.event.enddate
07-06-2024
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Wien
-
tuw.event.country
AT
-
tuw.event.institution
OVE Österreichischer Verband für Elektrotechnik
-
tuw.event.presenter
Wahid, Shan
-
tuw.event.track
Single Track
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.languageiso639-1
en
-
item.openairetype
conference poster not in proceedings
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_18co
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.orcid
0000-0003-1609-4497
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
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