<div class="csl-bib-body">
<div class="csl-entry">Bammer, F., & Huemer, F. F. (2024, March 6). <i>Inline Thickness Measurement with a Polarization Camera</i> [Conference Presentation]. LOPEC 2024, Munich, Germany.</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/209432
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dc.description.abstract
We present for quality control in R2R-production an inline-imaging-ellipsometer based on a polarization camera.
The polarization measurement is done with a segmented nano-grid-polarisator in front of the CMOS-sensor of the camera.
The measured polarisations are oriented at 0°, 45°, 90°, and 135°. The illumination is quasi-monocromatic, using collimated light from an LED.
The angle of incidence is fixed, typically near the Brewster-Angle of the substrate.
The system can be used for full quality control of thin layers with a thickness of up to 500nm.
The full foil width up to several meters can be imaged with 1200 points along the line to be examined in parallel with a frame rate of 24fps.
Typical problems with foil-vibrations and backside-reflection are solved via a measurement directly on a roll.
This yields a stable image of a line along the roll, with a length equal to the full width of the foil.
Due to the foil movement a complete 2D-view of the thickness-distribution can be obtained in-line and in-time.
The system was tested with different layer materials, e.g. SiO2, P3HT, PEDOT and Al2O3, all on PET-foils.
For a multi-layer production line the simple system can be easily installed after each production step,
to control every layer in-time.
en
dc.description.sponsorship
European Commission
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dc.language.iso
en
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dc.subject
Ellipsometry
en
dc.subject
real-time systems
en
dc.subject
quality assurance
en
dc.title
Inline Thickness Measurement with a Polarization Camera
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.relation.grantno
315665
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dc.type.category
Conference Presentation
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tuw.project.title
Dünnfilmmesstechnik auf organischer Photovoltaik
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tuw.researchTopic.id
Q1
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tuw.researchTopic.id
E6
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tuw.researchTopic.id
E5
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tuw.researchTopic.name
Photonics
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tuw.researchTopic.name
Sustainable Production and Technologies
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tuw.researchTopic.name
Efficient Utilisation of Material Resources
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tuw.researchTopic.value
50
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tuw.researchTopic.value
25
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tuw.researchTopic.value
25
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tuw.publication.orgunit
E311-02-2 - Forschungsgruppe Prozesstechnik
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tuw.publication.orgunit
E191-02 - Forschungsbereich Embedded Computing Systems
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tuw.author.orcid
0000-0002-2776-7768
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tuw.event.name
LOPEC 2024
en
tuw.event.startdate
05-03-2024
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tuw.event.enddate
07-03-2024
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Munich
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tuw.event.country
DE
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tuw.event.institution
OE-A...Organic and Printed Electronics Association
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tuw.event.presenter
Bammer, Ferdinand
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tuw.event.track
Multi Track
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wb.sciencebranch
Maschinenbau
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wb.sciencebranch
Werkstofftechnik
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2030
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wb.sciencebranch.oefos
2050
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
70
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wb.sciencebranch.value
15
-
wb.sciencebranch.value
15
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item.languageiso639-1
en
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item.openairetype
conference paper not in proceedings
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item.grantfulltext
restricted
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item.fulltext
no Fulltext
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item.cerifentitytype
Publications
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item.openairecristype
http://purl.org/coar/resource_type/c_18cp
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crisitem.author.dept
E311-02-2 - Forschungsgruppe Prozesstechnik
-
crisitem.author.dept
E191-02 - Forschungsbereich Embedded Computing Systems
