<div class="csl-bib-body">
<div class="csl-entry">Muzammil, M., Zarepakzad, S., Ali, B., Kerimzade, U., Alaca, B. E., & Alaka, B. E. (2024). Design Optimization of MEMS Stage for Pure Bending of Si Nanowires. In A. Kocabaş & C. Kocabaş (Eds.), <i>NANOTR-18 : Book of Abstracts</i> (pp. 10–10). Koç University. http://hdl.handle.net/20.500.12708/210491</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/210491
-
dc.language.iso
en
-
dc.subject
MEMS
en
dc.subject
Micromechanical Testing
en
dc.subject
Silicon Nanowires
en
dc.title
Design Optimization of MEMS Stage for Pure Bending of Si Nanowires
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.contributor.affiliation
Koç University, Turkey
-
dc.description.startpage
10
-
dc.description.endpage
10
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
NANOTR-18 : Book of Abstracts
-
tuw.peerreviewed
true
-
tuw.relation.publisher
Koç University
-
tuw.researchTopic.id
M2
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Materials Characterization
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
-
dc.description.numberOfPages
1
-
tuw.author.orcid
0009-0003-3649-2756
-
tuw.author.orcid
0000-0002-7029-4812
-
tuw.author.orcid
0000-0002-5807-3160
-
tuw.author.orcid
0000-0002-2712-1908
-
tuw.author.orcid
0000-0001-5931-8134
-
tuw.event.name
NANOTR-18: 18th Nanoscience and Nanotechnology Conference
