<div class="csl-bib-body">
<div class="csl-entry">Mayrhofer, P. H. (2023, April 18). <i>Fifty shades of TiN: How deposition conditions influence the growth morphology and thereby hardness and especially fracture toughness</i> [Conference Presentation]. 2nd Materials Science Colloquium, Lech am Arlberg, Austria. http://hdl.handle.net/20.500.12708/210871</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/210871
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dc.description.abstract
About fifty different TiN coatings were prepared by reactive and non-reactive magnetron sputtering, as well as by reactive cathodic arc evaporation. In addition to vary between these three individual deposition techniques, we also individually varied the substrate temperature (150–700 °C), working gas pressures (0.4–07 Pa), N2 gas volume fraction (0–70 %), substrates (e.g., Si(100), MgO(100)(110)(111), sapphire), substrate-to-target distance (40–130 mm), sputtering power density (3–13 W/cm2), as well as bias potential (-20 up to -80 V). The individual deposition techniques and conditions result in either pronounced columnar or rather dense growth morphologies, with open or compact column and grain boundary regions, preferred (111)- or (200)-orientation, or even epitaxially grown single-crystals. Due to these variations in growth morphology and orientation – which we will discuss in detail as well as their correlations – the hardness (obtained by nanoindentation) of TiN varied between 15.9 and 33.9 GPa and their fracture toughness between 0.6 and 2.9 MPa√m. The fracture toughness of these individually prepared TiN coatings was evaluated from micromechanical bending tests (inside a FEGSEM) of free-standing cantilevers.
en
dc.language.iso
en
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dc.subject
TiN
en
dc.subject
PVD
en
dc.subject
structure property relations
en
dc.title
Fifty shades of TiN: How deposition conditions influence the growth morphology and thereby hardness and especially fracture toughness
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Conference Presentation
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tuw.researchinfrastructure
Röntgenzentrum
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tuw.researchinfrastructure
Universitäre Service-Einrichtung für Transmissionselektronenmikroskopie
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tuw.researchinfrastructure
Vienna Scientific Cluster
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tuw.researchTopic.id
C1
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tuw.researchTopic.id
M8
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tuw.researchTopic.id
M4
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tuw.researchTopic.name
Computational Materials Science
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tuw.researchTopic.name
Structure-Property Relationsship
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tuw.researchTopic.name
Non-metallic Materials
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tuw.researchTopic.value
20
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tuw.researchTopic.value
40
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tuw.researchTopic.value
40
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tuw.publication.orgunit
E308-01 - Forschungsbereich Werkstoffwissenschaft
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tuw.author.orcid
0000-0001-7328-9333
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tuw.event.name
2nd Materials Science Colloquium
en
tuw.event.startdate
17-04-2023
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tuw.event.enddate
20-04-2023
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Lech am Arlberg
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tuw.event.country
AT
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tuw.event.institution
Montanuniversität Leoben
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tuw.event.presenter
Mayrhofer, Paul Heinz
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tuw.event.track
Single Track
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wb.sciencebranch
Maschinenbau
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wb.sciencebranch
Werkstofftechnik
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wb.sciencebranch.oefos
2030
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wb.sciencebranch.oefos
2050
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wb.sciencebranch.value
20
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wb.sciencebranch.value
80
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item.languageiso639-1
en
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item.openairetype
conference paper not in proceedings
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item.grantfulltext
none
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item.fulltext
no Fulltext
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item.cerifentitytype
Publications
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item.openairecristype
http://purl.org/coar/resource_type/c_18cp
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crisitem.author.dept
E308-01 - Forschungsbereich Werkstoffwissenschaft
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crisitem.author.orcid
0000-0001-7328-9333
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crisitem.author.parentorg
E308 - Institut für Werkstoffwissenschaft und Werkstofftechnologie
