<div class="csl-bib-body">
<div class="csl-entry">Filipovic, L. (2024). Merging Reactor and Feature Scales for Plasma Etch Modeling. In <i>IEEE NANO 2024 Book of Abstracts</i> (pp. 120–120).</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/212132
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dc.description.sponsorship
Christian Doppler Forschungsgesells
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dc.language.iso
en
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dc.subject
Multi-scale process modeling
en
dc.subject
Reactor-scale surrogate model
en
dc.title
Merging Reactor and Feature Scales for Plasma Etch Modeling
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.description.startpage
120
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dc.description.endpage
120
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dc.relation.grantno
00000
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dc.type.category
Abstract Book Contribution
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tuw.booktitle
IEEE NANO 2024 Book of Abstracts
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tuw.publication.invited
invited
-
tuw.project.title
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren
-
tuw.researchTopic.id
I6
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Digital Transformation in Manufacturing
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E360-01 - Forschungsbereich Mikroelektronik
-
tuw.publication.orgunit
E056-04 - Fachbereich TU-DX: Towards Applications of 2D Materials
