<div class="csl-bib-body">
<div class="csl-entry">Filipovic, L. (2024). Modeling and simulation of ALD in a level set framework. In <i>EFDS: Program Booklet: ALD for Industry</i> (pp. 24–24).</div>
</div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/212133
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dc.description.sponsorship
Christian Doppler Forschungsgesells
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dc.language.iso
en
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dc.subject
ALD modeling
en
dc.title
Modeling and simulation of ALD in a level set framework
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.description.startpage
24
-
dc.description.endpage
24
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dc.relation.grantno
00000
-
dc.type.category
Abstract Book Contribution
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tuw.booktitle
EFDS: Program Booklet: ALD for Industry
-
tuw.publication.invited
invited
-
tuw.project.title
Multi-Scale-Prozessmodellierung von Halbleiter-Bauelemente und -Sensoren
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E360-01 - Forschungsbereich Mikroelektronik
-
tuw.publication.orgunit
E056-04 - Fachbereich TU-DX: Towards Applications of 2D Materials
-
dc.description.numberOfPages
1
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tuw.author.orcid
0000-0003-1687-5058
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tuw.event.name
7th Workshop ALD for Industry, Tutorial and Industrial Exhibition 2024
