<div class="csl-bib-body">
<div class="csl-entry">Pfusterschmied, G., Zellner, C., Schock, D., & Schmid, U. (2025). Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS. In <i>SMSI 2025 : Proceedings : Proof reading version</i> (pp. 81–82). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/B2.1</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/216126
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dc.description.abstract
The study emphasises the advantages of using electrochemical porosification to fabricate SiC-based MEMS devices, specifically focusing on improving pore nucleation control while preserving surface integrity. The results indicate that surface roughness plays a crucial role in pore nucleation, demonstrating the potential for improved MEMS device performance through carefully controlled
substrate and etching conditions.
en
dc.language.iso
en
-
dc.subject
SiC, electrochemical etching
en
dc.subject
electrochemical etching
en
dc.subject
nucleation layer
en
dc.subject
MEMS
en
dc.subject
resonator
en
dc.title
Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.description.startpage
81
-
dc.description.endpage
82
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dc.type.category
Full-Paper Contribution
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tuw.booktitle
SMSI 2025 : Proceedings : Proof reading version
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tuw.relation.publisher
AMA Verband für Sensorik und Messtechnik e.V.
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tuw.researchTopic.id
M2
-
tuw.researchTopic.id
M1
-
tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.name
Surfaces and Interfaces
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tuw.researchTopic.value
50
-
tuw.researchTopic.value
50
-
tuw.publication.orgunit
E366-02 - Forschungsbereich Mikrosystemtechnik
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tuw.publisher.doi
10.5162/SMSI2025/B2.1
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dc.description.numberOfPages
2
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tuw.event.name
SMSI 2025 - Sensor and Measurement Science International
en
tuw.event.startdate
06-05-2025
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tuw.event.enddate
08-05-2025
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Nürnberg
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tuw.event.country
DE
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tuw.event.institution
AMA Verband für Sensorik und Messtechnik e.V.
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tuw.event.presenter
Pfusterschmied, Georg
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tuw.event.track
Multi Track
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wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
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wb.sciencebranch.oefos
2020
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wb.sciencebranch.value
100
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item.grantfulltext
restricted
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
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item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.openairetype
conference paper
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crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E366-02 - Forschungsbereich Mikrosystemtechnik
-
crisitem.author.dept
E387-01 - Forschungsbereich Photonik
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.parentorg
E387 - Institut für Photonik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
