<div class="csl-bib-body">
<div class="csl-entry">Moser, M. A. (2025). <i>Doping profiling and scanning electron microscopy on Silicon Carbide devices</i> [Dissertation, Technische Universität Wien]. reposiTUm. https://doi.org/10.34726/hss.2025.106907</div>
</div>
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dc.identifier.uri
https://doi.org/10.34726/hss.2025.106907
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/219571
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dc.language
English
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dc.language.iso
en
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dc.rights.uri
http://rightsstatements.org/vocab/InC/1.0/
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dc.subject
Rasterelektronenmikroskopie
de
dc.subject
SiC
de
dc.subject
Dotieungsrprofile
de
dc.subject
Scanning Electron Microscopy
en
dc.subject
SiC
en
dc.subject
Doping profiling
en
dc.title
Doping profiling and scanning electron microscopy on Silicon Carbide devices
en
dc.title.alternative
Doping-Profiling und Rasterelektronenmikroskopie an Siliciumcarbid-Leistungsbauelementen
