<div class="csl-bib-body">
<div class="csl-entry">Prado-Navarrete E, Aberl, J., Marböck J, Salomon, A., Haya Enriquez D, Wilfingseder C, Fromherz, T., Wind, L., Fuchsberger, A., Sistani, M., Weber, W. M., & Brehm, M. (2025, September 15). <i>Low temperature epitaxy of supersaturated SiGe and Ge layers on Si and SOI</i> [Conference Presentation]. The 2025 Fall Meeting of the European Materials Research Society (E-MRS), Warsaw, Poland. http://hdl.handle.net/20.500.12708/219724</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/219724
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dc.language.iso
en
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dc.subject
epitaxy
en
dc.subject
SiGe
en
dc.subject
Silizium
en
dc.subject
SOI
en
dc.title
Low temperature epitaxy of supersaturated SiGe and Ge layers on Si and SOI