<div class="csl-bib-body">
<div class="csl-entry">Salvadores Farran, N., Wojcik, T., Jerg, C., Gies, A., Ramm, J., Kolozsvári, S., Polcik, P., Fleig, J., Huber, T. M., Ntemou, E., Primetzhofer, D., & Riedl, H. (2025, May 13). <i>Morphological Effects and Impurity Levels on the High-Temperature Electrical Insulation of reactively sputtered AlN</i> [Conference Presentation]. The 51st International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2025), San Diego, United States of America (the).</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/222853
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dc.description.sponsorship
Christian Doppler Forschungsgesells
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dc.language.iso
en
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dc.subject
HiPIMS
en
dc.subject
High temperature dielectrics
en
dc.subject
impedance spectroscopy
en
dc.title
Morphological Effects and Impurity Levels on the High-Temperature Electrical Insulation of reactively sputtered AlN
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.contributor.affiliation
Oerlikon (Liechtenstein), Liechtenstein
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dc.contributor.affiliation
Oerlikon (Liechtenstein), Liechtenstein
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dc.contributor.affiliation
Plansee (Germany), Germany
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dc.contributor.affiliation
Plansee (Germany), Germany
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dc.contributor.affiliation
Uppsala University, Sweden
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dc.contributor.affiliation
Uppsala University, Sweden
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dc.relation.grantno
CDL-SEC
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dc.type.category
Conference Presentation
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tuw.project.title
Oberflächentechnik von hochbeanspruchten Präzisionskomponenten
