<div class="csl-bib-body">
<div class="csl-entry">Eisenmenger-Sittner, C., Djordic, G., Macheta, P., & Hintermayer, C. (2025, June 16). <i>Deposition of Eu doped Y2O3 films by RF from loose powder targets by RF magnetron sputtering</i> [Conference Presentation]. ÖGV Seminar 2025, Wien, Austria.</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/223473
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dc.description.abstract
Eu doped Y2O3 (Y2O3:Eu) shows strong luminescence and can be used for the study of electromagnetic radiation from tailored microstructures. These microstructures can be machined from a thin film by focused ion beam. For this purpose, a dense film and a fine grain structure are desirable to avoid shape instabilities in the FIB machining resulting from different sputter yields for varying crystallographic orientations.
Films of Y2O3:Eu with an approximate thickness if 1 µm were deposited from a loosely compressed 2 inch target made of Y2O3:Eu powder (grain size in the µm region), as compact sputter targets were not available. It was found that above a power threshold of approx. 80 W a contamination layer formed on the target surface. However, the formation of this layer had no effect on the crystalline quality of the film, and even was found to significantly increase the deposition rate.
en
dc.language.iso
en
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dc.subject
RF magnetron sputtering
en
dc.subject
powder target
en
dc.title
Deposition of Eu doped Y2O3 films by RF from loose powder targets by RF magnetron sputtering
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Conference Presentation
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tuw.researchTopic.id
M2
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tuw.researchTopic.id
M1
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tuw.researchTopic.id
M8
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tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.name
Surfaces and Interfaces
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tuw.researchTopic.name
Structure-Property Relationsship
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tuw.researchTopic.value
30
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tuw.researchTopic.value
30
-
tuw.researchTopic.value
40
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tuw.publication.orgunit
E138-03 - Forschungsbereich Functional and Magnetic Materials
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tuw.author.orcid
0000-0002-7096-6092
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tuw.event.name
ÖGV Seminar 2025
de
tuw.event.startdate
16-06-2025
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tuw.event.enddate
16-06-2025
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
Wien
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tuw.event.country
AT
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tuw.event.institution
Österreichische Gesellschaft für Vakuumtechnik
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tuw.event.presenter
Eisenmenger-Sittner, Christoph
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tuw.event.track
Single Track
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wb.sciencebranch
Physik, Astronomie
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wb.sciencebranch.oefos
1030
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wb.sciencebranch.value
100
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item.openairetype
conference paper not in proceedings
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item.openairecristype
http://purl.org/coar/resource_type/c_18cp
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item.cerifentitytype
Publications
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item.languageiso639-1
en
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item.grantfulltext
none
-
item.fulltext
no Fulltext
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crisitem.author.dept
E138-03 - Forschungsbereich Functional and Magnetic Materials
