DC Field
Value
Language
dc.contributor.author
Pechgraber, Daniel
-
dc.contributor.author
Heumesser, Florian
-
dc.contributor.author
Csencsics, Ernst
-
dc.contributor.author
Schitter, Georg
-
dc.date.accessioned
2026-01-14T06:02:56Z
-
dc.date.available
2026-01-14T06:02:56Z
-
dc.date.issued
2025
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Pechgraber, D., Heumesser, F., Csencsics, E., &#38; Schitter, G. (2025). Decoupling Adaptation of a 3-DoF Dual-Stage Positioning System for High-Precision Optical Inline Metrology. In <i>Proceedings of the ASPE 2025 Annual Meeting</i> (pp. 153–158).</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/224299
-
dc.language.iso
en
-
dc.subject
Mechatronics
en
dc.subject
Dual-Stage Positioning
en
dc.subject
Parameter Identification
en
dc.title
Decoupling Adaptation of a 3-DoF Dual-Stage Positioning System for High-Precision Optical Inline Metrology
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.contributor.affiliation
TU Wien, Austria
-
dc.relation.isbn
978-1-887706-62-9
-
dc.description.startpage
153
-
dc.description.endpage
158
-
dc.type.category
Full-Paper Contribution
-
tuw.booktitle
Proceedings of the ASPE 2025 Annual Meeting
-
tuw.container.volume
85
-
tuw.researchTopic.id
C6
-
tuw.researchTopic.id
I3
-
tuw.researchTopic.id
I8
-
tuw.researchTopic.name
Modeling and Simulation
-
tuw.researchTopic.name
Automation and Robotics
-
tuw.researchTopic.name
Sensor Systems
-
tuw.researchTopic.value
30
-
tuw.researchTopic.value
40
-
tuw.researchTopic.value
30
-
tuw.publication.orgunit
E369-01 - Forschungsbereich Mechatronische Systeme
-
dc.description.numberOfPages
6
-
tuw.author.orcid
0000-0002-0896-1928
-
tuw.author.orcid
0000-0002-8746-5892
-
tuw.event.name
ASPE 2025 Annual Meeting
en
tuw.event.startdate
03-11-2025
-
tuw.event.enddate
07-11-2025
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
San Diego
-
tuw.event.country
US
-
tuw.event.presenter
Pechgraber, Daniel
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
100
-
item.openairetype
conference paper
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
crisitem.author.dept
E369-01 - Forschungsbereich Mechatronische Systeme
-
crisitem.author.dept
TU Wien, Austria
-
crisitem.author.dept
E369-01 - Forschungsbereich Mechatronische Systeme
-
crisitem.author.dept
E369 - Institut für Mechatronik und Leistungselektronik
-
crisitem.author.orcid
0000-0002-0896-1928
-
crisitem.author.orcid
0000-0002-8746-5892
-
crisitem.author.parentorg
E369 - Institut für Mechatronik und Leistungselektronik
-
crisitem.author.parentorg
E369 - Institut für Mechatronik und Leistungselektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
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