<div class="csl-bib-body">
<div class="csl-entry">Fugger, A., Jelinek, M., & Valtiner, M. (2025). Evaluation of gamma- and neutron radiation emissions during proton irradiation of typical metals in semiconductor manufacturing. <i>NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS</i>, <i>566</i>. https://doi.org/10.1016/j.nimb.2025.165777</div>
</div>
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dc.identifier.issn
0168-583X
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/225115
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dc.description.abstract
Proton implantation has multiple uses in semiconductor manufacturing. Implanting through metallization can create problems in terms of radiation safety. Gamma and neutron emissions for proton irradiated stacks of Ti, TiN, W, AlCu, Si, Co with incident proton energies of 1 MeV to 2 MeV were measured. The most intense gamma lines resulted from Al, Si, F and Ti. Despite being present in trace amounts, F was found to contribute significantly to the gamma emission. Our results indicate a need for new metallization concepts to be used together with proton implantation.
en
dc.language.iso
en
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dc.publisher
ELSEVIER
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dc.relation.ispartof
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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dc.subject
Proton irradiation
en
dc.subject
gamma emission
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dc.subject
neutron emission
en
dc.subject
Semiconductor Manufacturing
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dc.title
Evaluation of gamma- and neutron radiation emissions during proton irradiation of typical metals in semiconductor manufacturing
en
dc.type
Article
en
dc.type
Artikel
de
dc.contributor.affiliation
TU Wien, Austria
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dc.contributor.affiliation
Infineon Technologies (Austria), Austria
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dc.type.category
Original Research Article
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tuw.container.volume
566
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tuw.journal.peerreviewed
true
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tuw.peerreviewed
true
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tuw.researchTopic.id
M2
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tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.value
100
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dcterms.isPartOf.title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
