DC Field
Value
Language
dc.contributor.author
Bammer, Ferdinand
-
dc.date.accessioned
2026-01-21T21:02:24Z
-
dc.date.available
2026-01-21T21:02:24Z
-
dc.date.issued
2025-05-28
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Bammer, F. (2025, May 28). <i>Polarization and Ellipsometry: Unlocking Superior Layer Quality</i> [Interview]. MVPro Online. http://hdl.handle.net/20.500.12708/225190</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/225190
-
dc.description
Link zum Beitrag: https://mvproeurope.com/polarization-and-ellipsometry-unlocking-superior-layer-quality/
-
dc.language.iso
en
-
dc.publisher
MVPro Online
-
dc.subject
Ellipsometrie
de
dc.subject
Qualitätssicherung
de
dc.subject
Schichtdickenmessung
de
dc.title
Polarization and Ellipsometry: Unlocking Superior Layer Quality
en
dc.type
Special Contribution
en
dc.type
Spezialbeitrag
de
dc.type.category
Interview
-
tuw.researchTopic.id
Q1
-
tuw.researchTopic.id
E6
-
tuw.researchTopic.name
Photonics
-
tuw.researchTopic.name
Sustainable Production and Technologies
-
tuw.researchTopic.value
30
-
tuw.researchTopic.value
70
-
tuw.publication.orgunit
E311-02-2 - Forschungsgruppe Prozesstechnik
-
dc.description.numberOfPages
2
-
wb.sciencebranch
Maschinenbau
-
wb.sciencebranch
Werkstofftechnik
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2030
-
wb.sciencebranch.oefos
2050
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
70
-
wb.sciencebranch.value
15
-
wb.sciencebranch.value
15
-
item.openairetype
interview
-
item.openairecristype
http://purl.org/coar/resource_type/c_26e4
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
crisitem.author.dept
E311-02-2 - Forschungsgruppe Prozesstechnik
-
crisitem.author.parentorg
E311-02 - Forschungsbereich Photonische Technologien
-
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