DC Field
Value
Language
dc.contributor.author
Bammer, Ferdinand
-
dc.contributor.author
Huemer, Florian Ferdinand
-
dc.contributor.author
Mahmoudi, Ramin
-
dc.contributor.author
Cherepanov, Maksym
-
dc.date.accessioned
2026-01-22T08:42:31Z
-
dc.date.available
2026-01-22T08:42:31Z
-
dc.date.issued
2025-07-13
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Bammer, F., Huemer, F. F., Mahmoudi, R., &#38; Cherepanov, M. (2025). Imaging-Ellipsometry in the Infrared. In <i>MIOMD 2025 : Mid-Infrared Optoelectronics Materials and Devices XVII : Abstract Book</i> (pp. 59–60).</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/225213
-
dc.description.sponsorship
EMG Automation GmbH
-
dc.language.iso
en
-
dc.subject
Ellipsometry
en
dc.subject
Inline metrology
en
dc.subject
Infrared
en
dc.title
Imaging-Ellipsometry in the Infrared
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.description.startpage
59
-
dc.description.endpage
60
-
dc.relation.grantno
1
-
dc.type.category
Abstract Book Contribution
-
tuw.booktitle
MIOMD 2025 : Mid-Infrared Optoelectronics Materials and Devices XVII : Abstract Book
-
tuw.project.title
Bildgebende Echtzeit-Infrarot-Ellipsometrie
-
tuw.researchTopic.id
X1
-
tuw.researchTopic.name
Beyond TUW-research focus
-
tuw.researchTopic.value
100
-
tuw.publication.orgunit
E311-02-2 - Forschungsgruppe Prozesstechnik
-
tuw.publication.orgunit
E191-02 - Forschungsbereich Embedded Computing Systems
-
dc.description.numberOfPages
2
-
tuw.author.orcid
0000-0002-2776-7768
-
tuw.author.orcid
0009-0005-2600-205X
-
tuw.author.orcid
0009-0000-8842-178X
-
tuw.event.name
International Conference on Mid-Infrared Optoelectronic Materials and Devices XVII (MIOMD 2025)
en
tuw.event.startdate
13-07-2025
-
tuw.event.enddate
16-07-2025
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Wien
-
tuw.event.country
AT
-
tuw.event.institution
TU Wien
-
tuw.event.presenter
Bammer, Ferdinand
-
tuw.event.presenter
Cherepanov, Maksym
-
tuw.event.track
Single Track
-
wb.sciencebranch
Maschinenbau
-
wb.sciencebranch
Werkstofftechnik
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2030
-
wb.sciencebranch.oefos
2050
-
wb.sciencebranch.oefos
2020
-
wb.sciencebranch.value
70
-
wb.sciencebranch.value
15
-
wb.sciencebranch.value
15
-
item.openairetype
conference paper
-
item.openairecristype
http://purl.org/coar/resource_type/c_5794
-
item.cerifentitytype
Publications
-
item.languageiso639-1
en
-
item.grantfulltext
restricted
-
item.fulltext
no Fulltext
-
crisitem.author.dept
E311-02-2 - Forschungsgruppe Prozesstechnik
-
crisitem.author.dept
E191-02 - Forschungsbereich Embedded Computing Systems
-
crisitem.author.orcid
0000-0002-2776-7768
-
crisitem.author.orcid
0009-0005-2600-205X
-
crisitem.author.parentorg
E311-02 - Forschungsbereich Photonische Technologien
-
crisitem.author.parentorg
E191 - Institut für Computer Engineering
-
crisitem.project.funder
EMG Automation GmbH
-
crisitem.project.grantno
1
-
Appears in Collections:
Conference Paper
Show simple item record

Page view(s)

9
checked on Jan 22, 2026

Download(s)

2
checked on Jan 22, 2026

Google ScholarTM

Check