<div class="csl-bib-body">
<div class="csl-entry">Pinter, T., Du, C., Fuchs, D., Astecker, T., Wojcik, T., & Mayrhofer, P. H. (2025, September 15). <i>TiN/TiB and NbC/TiB superlattice thin films via multi-cathode DC magnetron sputtering</i> [Conference Presentation]. FEMS 2025 EUROMAT, Granada, Spain. http://hdl.handle.net/20.500.12708/225856</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/225856
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dc.language.iso
en
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dc.subject
PVD
en
dc.subject
superlattice
en
dc.subject
thin films
en
dc.subject
mechanical properties
en
dc.title
TiN/TiB and NbC/TiB superlattice thin films via multi-cathode DC magnetron sputtering
en
dc.type
Presentation
en
dc.type
Vortrag
de
dc.type.category
Conference Presentation
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tuw.researchinfrastructure
Röntgenzentrum
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tuw.researchinfrastructure
Universitäre Service-Einrichtung für Transmissionselektronenmikroskopie