Capacitive Excitation of Out-of-Plane Modes in MEMS Resonators with a Planar Electrode Design

Abstract

This paper reports on a novel planar electrode design for the capacitive excitation of out-of-plane (OOP) resonance modes in MEMS test structures to study local material parameters. A simple device fabrication process is developed consisting of 4 process steps only. As a straightforward result, the fabricated plate resonator bends in the OOP directions due to a release of the intrinsic thin film stress. The planar electrodes and the bent resonator feature electrostatic forces in the OOP direction, thus actuating the OOP vibrational modes of the resonator.