Temperature-Dependence of Static and Dynamic Deflection of Bistable Piezoelectric Mems Membranes

Abstract

We present the temperature-dependence of static and dynamic deflections in bistable piezoelectric MEMS membranes. The total membrane stress is derived from the static buckling height and was correlated with dynamic responses to sinusoidal voltage signals. Measurement temperatures up to 300 °C yielded additional thermally-induced compressive stress in the membranes. This resulted in twice the static buckling height, reduced dynamic performance and a 250 % increase of the resonance frequency. Below the critical temperature of 250 °C, the static buckling behavior of the membranes can be substantially tuned by thermally-induced stress. However, above this limit, non-reversible changes of the membranes are measured.