Microscopic Fiducial Markers for Industrial Metrology Applications

Abstract

Metrology and quality control are essential for advancing European manufacturing toward zero-defect and sustainable production. Integrating optical measurement with computer vision and digital twins enables real-time monitoring and precise process optimization. Accurate alignment of high-resolution 3D data is critical for automating workflows and reducing uncertainty in complex manufacturing environments. This paper explores a fiducial microscopical marker-based approach to improve 3D dataset alignment in optical metrology, particularly for focus variation systems. Two microscale marker designs - mechanical indentations and precision-milled crosses - were evaluated for use with Alicona Infinite Focus systems.