<div class="csl-bib-body">
<div class="csl-entry">Lorenz, J., Asenov, A., Baer, E., Barraud, S., Millar, C., & Nedjalkov, M. (2018). Process Variability for Devices at and Beyond the 7nm Node. In J. A. Martino, J.-P. Raskin, S. Selberherr, H. Ishii, F. Gamiz, B.-Y. Nguyen, & A. Yoshino (Eds.), <i>Advanced CMOS-Compatible Semiconductor Devices 18</i> (pp. 113–124). ECS Transactions. http://hdl.handle.net/20.500.12708/29732</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/29732
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dc.publisher
ECS Transactions
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dc.subject
General Medicine
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dc.title
Process Variability for Devices at and Beyond the 7nm Node