<div class="csl-bib-body">
<div class="csl-entry">Antonacci, G., Goyvaerts, J., Zhao, H., Baumgartner, B., Lendl, B., & Baets, R. (2020). Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit. In <i>Silicon Photonics XV</i>. Silicon Photonics XV, San Francisco, CA, United States of America (the). SPIEdigitallibrary. https://doi.org/10.1117/12.2557047</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/50810
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dc.description.abstract
We demonstrate a compact on-chip gas sensor based on a SiN photonic integrated circuit providing an estimated detection limit of 0.1ppm for a variety of gas vapors, including IPA, ethanol and acetone. The sensor consists of an integrated Mach-Zehnder interferometer having one arm coated with an absorptive mesoporous layer to enhance the interaction of the gas vapors with the waveguide evanescent field. Gas detection is accomplished by monitoring the spectral shift of the output signal induced by a change in the effective refractive index of the coated waveguide. Results pave the way to novel integrated solutions for environmental safety monitoring.
en
dc.publisher
SPIEdigitallibrary
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dc.title
Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit
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dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
Silicon Photonics XV
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dc.type.category
Full-Paper Contribution
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dc.publisher.place
San Francisco
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tuw.booktitle
Silicon Photonics XV
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tuw.peerreviewed
true
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tuw.researchTopic.id
Q1
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tuw.researchTopic.id
M2
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tuw.researchTopic.name
Photonics
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tuw.researchTopic.name
Materials Characterization
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tuw.researchTopic.value
40
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tuw.researchTopic.value
60
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tuw.publication.orgunit
E164-02-1 - Forschungsgruppe Prozessanalytik
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tuw.publisher.doi
10.1117/12.2557047
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dc.description.numberOfPages
6
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tuw.event.name
Silicon Photonics XV
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tuw.event.startdate
01-02-2020
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tuw.event.enddate
06-02-2020
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
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tuw.event.place
San Francisco, CA
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tuw.event.country
US
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tuw.event.presenter
Antonacci, Giuseppe
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wb.sciencebranch
Chemie
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wb.sciencebranch.oefos
1040
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wb.facultyfocus
Chemistry and Technology of Materials
de
wb.facultyfocus
Chemistry and Technology of Materials
en
wb.facultyfocus.faculty
E150
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item.fulltext
no Fulltext
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item.cerifentitytype
Publications
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item.openairecristype
http://purl.org/coar/resource_type/c_5794
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item.openairetype
conference paper
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item.grantfulltext
none
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crisitem.author.dept
E164-02-1 - Forschungsgruppe Prozessanalytik
-
crisitem.author.dept
E164-02 - Forschungsbereich Umwelt-, Prozessanalytik und Sensoren
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crisitem.author.orcid
0000-0002-9136-6811
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crisitem.author.orcid
0000-0003-3838-5842
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crisitem.author.parentorg
E164-02 - Forschungsbereich Umwelt-, Prozessanalytik und Sensoren
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crisitem.author.parentorg
E164 - Institut für Chemische Technologien und Analytik