<div class="csl-bib-body">
<div class="csl-entry">Klemenschits, X., Selberherr, S., & Filipovic, L. (2020). Geometric Advection Algorithm for Process Emulation. In <i>2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)</i>. 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Tokyo, Japan. IEEE. https://doi.org/10.23919/sispad49475.2020.9241678</div>
</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/77161
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dc.language.iso
en
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dc.relation.ispartofseries
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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dc.title
Geometric Advection Algorithm for Process Emulation
en
dc.type
Konferenzbeitrag
de
dc.type
Inproceedings
en
dc.relation.publication
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
-
dc.relation.isbn
978-4-86348-763-5
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dc.relation.doi
10.23919/SISPAD49475.2020.9241672
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dc.relation.issn
1946-1569
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dc.type.category
Full-Paper Contribution
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dc.relation.eissn
1946-1577
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tuw.booktitle
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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tuw.relation.publisher
IEEE
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tuw.publication.orgunit
E360 - Institut für Mikroelektronik
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tuw.publisher.doi
10.23919/sispad49475.2020.9241678
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dc.description.numberOfPages
4
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tuw.event.name
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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tuw.event.startdate
23-09-2020
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tuw.event.enddate
06-10-2020
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tuw.event.online
On Site
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tuw.event.type
Event for scientific audience
-
tuw.event.place
Tokyo
-
tuw.event.country
JP
-
tuw.event.presenter
Klemenschits, Xaver
-
wb.sciencebranch
Elektrotechnik, Elektronik, Informationstechnik
-
wb.sciencebranch.oefos
2020
-
wb.facultyfocus
Mikro- und Nanoelektronik
de
wb.facultyfocus
Micro- and Nanoelectronics
en
wb.facultyfocus.faculty
E350
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wb.presentation.type
science to science/art to art
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item.openairetype
Konferenzbeitrag
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item.openairetype
Inproceedings
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restricted
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no Fulltext
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Publications
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item.cerifentitytype
Publications
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http://purl.org/coar/resource_type/c_18cf
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item.openairecristype
http://purl.org/coar/resource_type/c_18cf
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item.languageiso639-1
en
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crisitem.author.dept
E360 - Institut für Mikroelektronik
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crisitem.author.dept
E360 - Institut für Mikroelektronik
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crisitem.author.dept
E360-01 - Forschungsbereich Mikroelektronik
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crisitem.author.orcid
0000-0002-5583-6177
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crisitem.author.orcid
0000-0003-1687-5058
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
