<div class="csl-bib-body">
<div class="csl-entry">Steinhauer, S. (2014). <i>Gas sensing properties of metal oxide nanowires and their CMOS integration</i> [Dissertation, Technische Universität Wien]. reposiTUm. https://doi.org/10.34726/hss.2014.25515</div>
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dc.identifier.uri
https://doi.org/10.34726/hss.2014.25515
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/7752
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dc.description
Abweichender Titel laut Übersetzung der Verfasserin/des Verfassers
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dc.description.abstract
Highly sensitive gas detecting devices are of significant importance in various applications such as environmental air quality monitoring or occupational safety and health. In the last decades considerable advances have been made in the development of conductometric metal oxide gas sensors and in optimization of sensor performance regarding sensitivity and selectivity. Traditional metal oxide based gas sensors employ thin or thick film resistors and their working principle is based on electrical conductance changes due to interaction with surrounding gas molecules. Due to favorable material properties, nanowire-based devices are considered as potential candidate for the realization of miniaturized, next-generation gas sensors with improved performance. In particular the integration of nanomaterials with CMOS technology is expected to result in low power consumption gas sensor systems for daily life applications. In this thesis, the gas sensing properties of nanowire devices based on two different metal oxide materials, i.e. cupric oxide (CuO) and zinc oxide (ZnO), are investigated. CuO and ZnO nanowires are obtained by various synthesis techniques on wire and thin substrates. Complimentary characterization methods are employed for structural as well as compositional analysis. Fabrication processes are developed for the realization of single nanowire as well as nanowire array devices, which are characterized in terms of electrical properties and gas sensing performance. The nanowire gas sensors are operated at elevated temperatures up to 350 _C and device resistance changes are investigated during exposure to water vapor and small concentrations of the toxic gases CO (ppm-level range) and H2S (ppb-level range). The results obtained for the different sensor configurations are compared and interpreted in terms of sensing mechanism model. Furthermore, the integration of CuO nanowire arrays on CMOS microhotplates is demonstrated resulting in miniaturized, low power consumption gas sensor devices.
en
dc.language
English
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dc.language.iso
en
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dc.rights.uri
http://rightsstatements.org/vocab/InC/1.0/
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dc.subject
Gassensoren
de
dc.subject
Nanostrukturen
de
dc.subject
Gas sensors
en
dc.subject
nano structures
en
dc.title
Gas sensing properties of metal oxide nanowires and their CMOS integration
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dc.title.alternative
Gas Sensing Properties of Metal Oxide Nanowires and their CMOS Integration
de
dc.type
Thesis
en
dc.type
Hochschulschrift
de
dc.rights.license
In Copyright
en
dc.rights.license
Urheberrechtsschutz
de
dc.identifier.doi
10.34726/hss.2014.25515
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dc.contributor.affiliation
TU Wien, Österreich
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dc.rights.holder
Stephan Steinhauer
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tuw.version
vor
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tuw.thesisinformation
Technische Universität Wien
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dc.contributor.assistant
Köck, Anton
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tuw.publication.orgunit
E362 - Institut für Festkörperelektronik
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dc.type.qualificationlevel
Doctoral
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dc.identifier.libraryid
AC11872116
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dc.description.numberOfPages
160
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dc.identifier.urn
urn:nbn:at:at-ubtuw:1-66392
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dc.thesistype
Dissertation
de
dc.thesistype
Dissertation
en
dc.rights.identifier
In Copyright
en
dc.rights.identifier
Urheberrechtsschutz
de
tuw.advisor.staffStatus
staff
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tuw.assistant.staffStatus
staff
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item.cerifentitytype
Publications
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item.openairetype
doctoral thesis
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item.mimetype
application/pdf
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item.fulltext
with Fulltext
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item.languageiso639-1
en
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item.openairecristype
http://purl.org/coar/resource_type/c_db06
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item.grantfulltext
open
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item.openaccessfulltext
Open Access
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crisitem.author.dept
E389 - Institute of Telecommunications
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik