<div class="csl-bib-body">
<div class="csl-entry">Langegger, R. (2014). <i>Advanced nanopattern formation by focused ion beam induced self organisation</i> [Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/78338</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/78338
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dc.description
Abweichender Titel laut Übersetzung der Verfasserin/des Verfassers
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dc.description
Zsfassung in dt. Sprache
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dc.description.abstract
The interaction of focused ion beams with various semiconductors and semi-metals was investigated in this thesis. Parameter variation with respect ion fluence, beam incidence angle, temperature, acceleration voltage and scanning strategy lead to a variety of surface modifications. Furthermore the oxidation behaviour of Germanium with respect to implanted ion doses were investigated. At last channeling effect on Bismuth found to be critically depending on the specimen temperature.
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134 Bl.
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dc.language
English
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dc.language.iso
en
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dc.subject
FIB
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dc.subject
Germanium
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dc.subject
HOPG
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dc.subject
Bismuth
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dc.title
Advanced nanopattern formation by focused ion beam induced self organisation
