DC Field
Value
Language
dc.contributor.advisor
Schmid, Ulrich
-
dc.contributor.author
Krčić, Nenad
-
dc.date.accessioned
2022-09-02T03:50:51Z
-
dc.date.issued
2017
-
dc.date.submitted
2017-10
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Krčić, N. (2017). <i>Fabrication and characterization of GaN based MEMS structures</i> [Diploma Thesis, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/79489</div> </div>
-
dc.identifier.uri
http://hdl.handle.net/20.500.12708/79489
-
dc.format
98 Seiten
-
dc.language
English
-
dc.language.iso
en
-
dc.subject
gallium
en
dc.subject
nitride
en
dc.subject
MEMS
en
dc.title
Fabrication and characterization of GaN based MEMS structures
en
dc.type
Thesis
en
dc.type
Hochschulschrift
de
dc.contributor.affiliation
TU Wien, Österreich
-
dc.publisher.place
Wien
-
tuw.thesisinformation
Technische Universität Wien
-
tuw.publication.orgunit
E366 - Institut für Sensor- und Aktuatorsysteme
-
dc.type.qualificationlevel
Diploma
-
dc.identifier.libraryid
AC14483836
-
dc.description.numberOfPages
98
-
dc.thesistype
Diplomarbeit
de
dc.thesistype
Diploma Thesis
en
tuw.advisor.staffStatus
staff
-
item.languageiso639-1
en
-
item.openairetype
master thesis
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.cerifentitytype
Publications
-
item.openairecristype
http://purl.org/coar/resource_type/c_bdcc
-
crisitem.author.dept
TU Wien
-
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