<div class="csl-bib-body">
<div class="csl-entry">Hackl, T., Poik, M., & Schitter, G. (2022). DC-Bias-free Surface Potential Measurements by Heterodyne AC Kelvin Probe Force Microscopy. In <i>Proceedings of 2022 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)</i> (pp. 1–5). https://doi.org/10.1109/I2MTC48687.2022.9806676</div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/80630
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dc.description.abstract
This paper presents the development of a novel Atomic Force Microscopy mode, enabling dc-bias-free surface potential measurements with high spatial resolution. The influence of the cantilever cone, cantilever beam and lift height in dc-biasfree Kelvin Probe Force Microscopy (AC-KPFM) is reduced due to the proposed heterodyne detection principle, which is sensitive to the electrostatic force gradient. The accuracy of the potential measurement as compared to amplitude modulated KPFM modes is improved, while keeping the advantages of closed-loop and dc-bias-free operation. Measurements on a gold-aluminum test-sample show an increase in spatial resolution of 37% and lift height independent, quantitative surface potential measurements.
en
dc.language.iso
en
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dc.subject
dc-bias-free
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dc.subject
heterodyne detection
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dc.subject
kelvin probe force microscopy
en
dc.subject
surface potential
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dc.title
DC-Bias-free Surface Potential Measurements by Heterodyne AC Kelvin Probe Force Microscopy
en
dc.type
Inproceedings
en
dc.type
Konferenzbeitrag
de
dc.description.startpage
1
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dc.description.endpage
5
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dc.type.category
Full-Paper Contribution
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tuw.booktitle
Proceedings of 2022 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)
