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DC Field
Value
Language
dc.contributor.author
Henkel, Christoph
-
dc.contributor.author
Abermann, Stephan
-
dc.contributor.author
Bethge, Ole
-
dc.contributor.author
Bertagnolli, Emmerich
-
dc.date.accessioned
2022-10-21T09:59:24Z
-
dc.date.available
2022-10-21T09:59:24Z
-
dc.date.issued
2008
-
dc.identifier.citation
<div class="csl-bib-body"> <div class="csl-entry">Henkel, C., Abermann, S., Bethge, O., &#38; Bertagnolli, E. (2008). <i>Impact of ALD deposition of platinum films on high-k dielectric materials</i>. Workshop on Dielectrics in Microelectronics (WODIM), Catania, EU. http://hdl.handle.net/20.500.12708/88903</div> </div>
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dc.identifier.uri
http://hdl.handle.net/20.500.12708/88903
-
dc.title
Impact of ALD deposition of platinum films on high-k dielectric materials
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dc.type
Präsentation
de
dc.type
Presentation
en
dc.type.category
Poster presentation
-
tuw.peerreviewed
false
-
tuw.publication.orgunit
E362 - Institut für Festkörperelektronik
-
tuw.event.name
Workshop on Dielectrics in Microelectronics (WODIM)
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tuw.event.startdate
26-06-2006
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tuw.event.enddate
28-06-2006
-
tuw.event.online
On Site
-
tuw.event.type
Event for scientific audience
-
tuw.event.place
Catania
-
tuw.event.country
EU
-
tuw.event.presenter
Henkel, Christoph
-
wb.sciencebranch
Elektrotechnik, Elektronik
-
wb.sciencebranch.oefos
25
-
item.grantfulltext
none
-
item.fulltext
no Fulltext
-
item.openairetype
conference poster not in proceedings
-
item.openairecristype
http://purl.org/coar/resource_type/c_18co
-
item.cerifentitytype
Publications
-
crisitem.author.dept
E362 - Institut für Festkörperelektronik
-
crisitem.author.dept
E362 - Institut für Festkörperelektronik
-
crisitem.author.dept
E362-01 - Forschungsbereich Optoelektronische Materialien
-
crisitem.author.dept
E362 - Institut für Festkörperelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E362 - Institut für Festkörperelektronik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
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