Book of Abstract, 11th Europ. Conf. on Applications of Surface Analysis (ECASIA´05)

Book title Buchtitel
Book of Abstract, 11th Europ. Conf. on Applications of Surface Analysis (ECASIA´05)
 

Publications Publikationen

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PreviewAuthor(s)TitleTypeIssue Date
1Forsich, Christian ; Kolm, Ralph ; Tomastik, Christian ; Laimer, Johann ; Störi, Herbert ; Humlicek, J. Control of the composition of titanium nitride coatings during plasma-assisted chemical vapour deposition by spectroscopic ellipsometryKonferenzbeitrag Inproceedings2005
2Forsich, Christian ; Laimer, Johann ; Störi, Herbert ; Humlicek, J. On the spectroscopic ellipsometry for monitoring of diamond-like carbon (DLC) growth during plasma-assisted chemical vapour deposition (PACVD)Konferenzbeitrag Inproceedings2005
3Forsich, Christian ; Gebeshuber, I.C. ; Laimer, Johann ; Störi, Herbert ; Humlicek, J. Spectroscopic ellipsometry as an in-situ diagnostic tool for the avoidance of compound layer formation during plasma nitridingKonferenzbeitrag Inproceedings2005