5th Workshop on Focused Electron Beam Induced Processing - Program FEBIP 2014
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5th Workshop on Focused Electron Beam Induced Processing - Program FEBIP 2014
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Wanzenböck, Heinz D. ; Hochleitner, Gottfried ; Mika, Johann ; Shawrav, Mostafa Moonir ; Bertagnolli, Emmerich | Insights in precursor flux distribution on the sample surface - Is the nozzle setup really | Konferenzbeitrag Inproceedings | 2014 | |
| 2 | Barth, Sven Christian ; Biegger, Felix | Volatile Precursor Species for the Growth of Semiconductors | Konferenzbeitrag Inproceedings | 2014 |