WoDiM 2008
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WoDiM 2008
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Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Bethge, Ole ; Abermann, Stephan ; Henkel, Christoph ; Bertagnolli, Emmerich | Electrical characteristics of ALD Al2O3/ZrO2/Al2O3 high-k dielectric stacks | Konferenzbeitrag Inproceedings | 2008 | |
2 | Abermann, Stephan ; Bethge, Ole ; Henkel, Christoph ; Bertagnolli, Emmerich | Investigation of conductance- and trapping-characteristics of Al2O3/ZrO2/Al2O3 high-k gate oxides | Konferenzbeitrag Inproceedings | 2008 |