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This item was automatically migrated from a legacy system. It's data has not been checked and might not meet the quality criteria of the present system.
Record link:
http://hdl.handle.net/20.500.12708/70604
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Title:
Electrical characteristics of ALD Al2O3/ZrO2/Al2O3 high-k dielectric stacks
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Citation:
Bethge, O., Abermann, S., Henkel, C., & Bertagnolli, E. (2008). Electrical characteristics of ALD Al2O3/ZrO2/Al2O3 high-k dielectric stacks. In
WoDiM 2008
(pp. 125–126). http://hdl.handle.net/20.500.12708/70604
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Publication Type:
Inproceedings - Poster Contribution
en
Authors:
Bethge, Ole
Abermann, Stephan
Henkel, Christoph
Bertagnolli, Emmerich
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Organisational Unit:
E362 - Institut für Festkörperelektronik
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Published in:
WoDiM 2008
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Date (published):
2008
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Event name:
Workshop on Dielectrics in Microelectronics (WODIM)
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Event date:
26-Jun-2006 - 28-Jun-2006
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Event place:
Catania, EU
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Number of Pages:
2
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Peer reviewed:
No
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Science Branch:
Elektrotechnik, Elektronik
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Appears in Collections:
Conference Paper
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